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The remarkable advantage of ceramic materials is thermo-mechanical properties. Its thermal properties include coefficient of expansion, coefficient of thermal conductivity, thermal capacity, aging under the influence of the thermal cycle, and the ability to withstand higher temperatures. These characteristics are particularly useful for aerospace applications. Their chemical bonds are not broken by heat or ultraviolet radiation, and they do not expel gases in the extreme-vacuum of deep space. Alumina Ceramics (Al203), for example, is the most cost-effective ceramic material and the most commonly used ceramic material, with strong thermal conductivity. Aluminum nitride (AlN) also provides excellent thermal conductivity.

Some favorable properties of ceramic materials for aerospace are as follows: 

1. Thermal expansion coefficient is far lower than the most of metal materials
2. Good electrical isolation at high temperature, longer life time
3. Good thermal conductivity is beneficial to thermal diffusion, the stability of the dielectric property, low loss under high frequency
4. High chemical stability, very slow aging process
5. Highly reliable conductor, high processing temperature, ideal materials for EUV semiconductor equipment sensors.

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